Tools and Instrumentation for Nanotechnology

SUMMARY

OBJECTIVE AND PURPOSE OF THIS REPORT

This report focuses on tools and instrumentation for nanotechnology-thetechnologies, products, and applications that are allowing scientists andbusiness people alike to do the work of nanotechnology. Every aspect of basicnanoscale science as well as commercial production of nanotechnologies isdependent upon the capacity of instruments and tools to measure, sense,fabricate and manipulate matter at the nanoscale.

Nanotechnology tools andinstruments are the hardware, software, and supplies used to measure andmanipulate structures on the nanoscale. They include microscopes, probes,lithography systems, manipulation and fabrication systems, software, and otheraccessories.

Rarely are these instruments unique to nanotechnologies. Most ofthem were developed in other industries, especially in semiconductor andchipmaking, where sub-micron manufacturing principles have fueled thecommunications explosion. Chemistry, physics, biology, and materials sciencehave also had a significant impact, and it is in this interdisciplinarity thatnanotechnology is unique.

The history of nanoscale instrumentation is rathershort, barely twenty years. That history is measurable to the day in 1981 thatHeinrich Rohrer and Gerd Binnig, scientists at IBM Research in Zurich, inventedthe scanning tunneling microscope (STM). In the intervening decades a wide rangeof machines and tools have emerged, including especially the atomic forcemicroscope (AFM) (invented by Binnig, Christoph Gerber and Calvin Quate in1986), that allow not only the imaging and analysis of a surface at themolecular and atomic levels, but also the manipulation of individual atoms andmolecules.

To image a surface, an AFM measures the tiny deflections of a sharpprobe when dragged over a surface. As the elevation of the surface changes, theprobe is deflected up or down, and this deflection is measured. A computer isable to combine the measurements from the whole surface and produce an image ofthe surface's topography.

In 1986, two important events in scanning probemicroscopy (SPM) history occurred: Binnig and Rohrer won the Nobel Prize forinventing the STM, and Digital Instruments was formed. Digital Instruments wasthe first company to commercially market a line of SPMs. The company sold some300 microscopes between 1986 and 1990 for about $70,000 a piece. In 1998,Digital Instruments was acquired by Veeco Instruments.

In 1990, another pairof IBM employees, D.M. Eigler and E.K. Schweitzer published the now-well knownimage of IBM's initials spelled out with 35 individual xenon atoms. Byconsciously manipulating individual atoms, Eigler and Schweitzer hadfundamentally changed the playing field, exhibiting that nanoscale precision andfabrication was possible for industrial purposes.

The commercial use of thesemicroscopes of course engendered a range of progeny: the microscopes requirehigh-tech probes and tips in order to do their work; they require sophisticatedsoftware to produce readable images; they require add-ons and accessories forspecialty functions; and they require extremely well-trained users.

These areall new markets, and research facilities, whether for basic or applied science,and corporate research divisions are the major customers for them. Over the nextfew years, however, we will witness a new industry emerge, as industries beginto see the cost benefit of nanotechnology to the bottom line. Some of theearliest beneficiaries will be the life sciences and semiconductor industries,which, by the very nature of their businesses, are already dealing withnanoscale environments. The integration of second and third generationnanotechnology instruments and tools will mark the beginning of an industrialparadigm shift.

Nanotechnology tools are not limited to microscopy product;they can also take the shape of furnaces or reactors and other equipment for themanufacture of carbon nanotubes or other nanoparticles. Because theseapparatuses are usually custom designed for research or commercial purposes, andthere is, therefore, no particular market for them, this report does not addressfurnaces or reactors.

The report summarizes the status of instrumentationtechnology for nanotechnology applications. It also sheds light on the marketsfor these tools and instruments, including nanotechnology companies, researchfacilities, corporate R&D and government labs, and estimates potential sizeand segmentation of these discrete areas.

REASONS FOR THIS STUDY

Nanotechnology has received an enormous amount of attention in the past fewyears, but little data exists to help business people make strategic decisionsabout the integration of nanotechnologies into their planning. Some analystshave compared instruments for nanotechnology to "shovels for the goldrush." However, it is extremely difficult to get reliable information aboutthe extent of instrumentation being sold specifically for nanotechnologyapplications. This report attempts to cut through the wishful thinking tounderstand the trends and issues that are shaping the tools and instrumentsmarket.

CONTRIBUTION OF THE STUDY

This report shows the current size and the future size of the tools andinstrumentation market in the U.S. and globally. But while the full range ofcompetitors is global, most of the markets discussed here are dominated by U.S.companies. The National Nanotechnology Initiative is certainly responsible foran expanded awareness of nanotechnologies in the U.S., as well as forsignificant funding for nanotechnology research.

This fact has actuallyaffected a global trend, the rise of Japan and Korea in microscopy products.Those countries still dominate light microscopy, but have fallen behind the U.S.in electron and probe microscopy. Switzerland has recently joined thecompetitive landscape as well and could be an able contender.

This reportoffers a means of understanding the strategic importance of instrumentation inthe nanotechnology landscape and suggests some key avenues for investment.

SCOPE AND FORMAT

There are few, if any, reports currently available that look discretely atthe emerging markets for tools and instruments specifically developed for andused by the nanotechnology community (as opposed to the much largersemiconductor capital equipment and chemical/materials engineering markets, fromwhich many nanotechnology instruments are derived). There are only a handful ofcapital equipment makers building instrumentation specifically fornanotechnologies. Most manufacturers offer broad product lines that encompassnanotechnology, but do not discretely break nanotechnology sales. This oftenmakes it particularly hard to discern nanotechnology sales from other technologyareas. This report therefore attempts to limit the scope by excluding particulartechnology areas, especially the semiconductor industry which, while certainlyworking with nanoscale products, is clearly its own sector.

While manyinnovations are impacting the instrumentation marketplace, relatively few majoradvances have taken place in the last few years. Nanolithography, for example,promises to be a major area of growth over time, but even the most ardentsupporters of the technology do not see significant market impact fromnanolithography for a decade. This does not mean that nanolithography and othertechniques will not have short-term impact, but rather, that we must be aware ofthe incremental effect of these technologies. Thus, this report focuses onnear-term opportunities, rather than on longer-term ones that requiresignificant technological advances.

The report is broken into five sections.First there is a technology overview that gives the broad details ofinstrumentation and tools, along with some of their characteristics andtechnical aspects. Next there is a description of the instrumentation industry,including profiles of some of the key players. A larger review of relevantcompanies appears in the section on company profiles. Following this section onindustry structure there is a description of tools and instruments by type,followed by a description of the markets for instruments, including futuretrends. The fourth section reviews patent and IP issues in nanotechnologyinstrumentation, including a review of the patent infringement suit that Veecohas brought against Asylum Research. The report concludes with a listing of morethan 80 companies in the nanotechnology instrumentation field.

METHODOLOGY AND SOURCES OF INFORMATION

This report is the end result of 4 months of concerted effort by the author.The primary sources of information for writing this report came from interviewswith several dozen people in industry, academia, and the government. The authoralso attended meetings and conferences, and much precious insight was gainedfrom these sources as well. Many of the people interviewed are recognizedauthorities in the field and provided invaluable assistance, and the authorwould like to thank all who took the time to offer their help with this project.Secondary sources used for this report include a number of publications by thefederal government, plus items gleaned from the Internet, corporate literature,and publications in the peer-reviewed literature.

TABLE OF CONTENTS

• OBJECTIVE AND PURPOSE OF THIS REPORT
• REASONS FOR THIS STUDY
• CONTRIBUTION OF THE STUDY
• SCOPE AND FORMAT
• METHODOLOGY AND SOURCES OF INFORMATION
• AUTHOR'S CREDENTIALS
• RELATED PUBLICATIONS

• Summary Table:

  GLOBAL NANOTECHNOLOGY INSTRUMENTS AND TOOLS SALES, 2000THROUGH 2008 ($ MILLIONS)

• Summary Figure:

  YEAR-TO-YEAR GROWTH IN MENTIONS OF THE WORD "NANOTECHNOLOGY"IN THE PRINT MEDIA, 1999-2003

• SCANNING ELECTRON MICROSCOPY
• SCANNING PROBE MICROSCOPES
  • ATOMIC FORCE MICROSCOPE
  • SCANNING TUNNELING MICROSCOPE
  • NEAR-FIELD SCANNING OPTICAL MICROSCOPE (SNOM OR NSOM)
• Table 1 COMPARATIVE SCANNING MICROSCOPE CAPABILITIES
• Table 2 KEY SCANNING MICROSCOPE MANUFACTURERS
  • NANOLITHOGRAPHY
    • PHOTORESIST NANOLITHOGRAPHY
    • ELECTRON BEAM (E-BEAM) NANOLITHOGRAPHY
    • ION BEAM NANOLITHOGRAPHY
• Table 3 COMPARATIVE NANOLITHOGRAPHY CAPABILITIES
• Table 4 KEY NANOLITHOGRAPHY SYSTEM MANUFACTURERS
  • NANOMANIPULATION AND FABRICATION
• Table 5 COMPARATIVE NANOMANIPULATION CAPABILITIES
• Table 6 KEY NANOMANIPULATION AND POSITIONING SYSTEM MANUFACTURERS
• Table 6 (CONTINUED)
  • SIMULATION
• Table 7 COMPARATIVE NANOSIMULATION CAPABILITIES
• Table 8 KEY NANOSCALE SIMULATION, MODELING AND SOFTWARE PRODUCERS
  • PROBES, TIPS
• Table 9 COMPARATIVE PROBE CHARACTERISTICS
• Table 9 (CONTINUED)

• OVERVIEW
• Figure 1 RELATIVE MATURITY OF INSTRUMENTATION AND TOOLS FOR NANOTECHNOLOGYMARKETS
  • AFM MARKET
  • LITHOGRAPHY
• Table 10 U.S. AND GLOBAL MAJOR NANOTECHNOLOGY MARKET SHARE BY COMPANY,2003 (%)
  • MICROSCOPY MANUFACTURERS FOR NANOTECHNOLOGY APPLICATIONS
  • Veeco
  • Acquisitions
• Table 11 NANOTECHNOLOGY-RELATED ACQUISITIONS BY VEECO
  • Asylum Research
• Figure 2 VEECO, INC., STOCK CHART, 2002-2003
  • FEI
• Figure 3 FEI, INC., STOCK CHART, 2002-2003
  • Asylum Research
• Table 12 ASYLUM RESEARCH NANOTECHNOLOGY PRODUCTS
  • Nanosurf AG
• Table 13 NANOSURF NANOTECHNOLOGY PRODUCTS
• Table 14 U.S. AND GLOBAL NANOTECHNOLOGY MICROSCOPY MARKET SHARE BYCOMPANY, 2003 (%)
  • PROBES
  • NPoint
• Table 15 NPOINT NANOTECHNOLOGY PRODUCTS
  • Nanotools
• Table 16 NANOTOOLS NANOTECHNOLOGY PRODUCTS
• Table 17 U.S. AND GLOBAL NANOTECHNOLOGY PROBES MARKET SHARE BY COMPANY,2003
  • MANIPULATION AND CONTROL TOOLS
  • Arryx, Inc.
• Table 18 ARRYX NANOTECHNOLOGY PRODUCTS
  • Zyvex
• Table 19 ZYVEX NANOTECHNOLOGY PRODUCTS
• Table 20 U.S. AND GLOBAL NANOTECHNOLOGY MANIPULATION SYSTEMS MARKET SHAREBY COMPANY, 2003

• OVERVIEW
  • NANOTECHNOLOGY AND THE SEMICONDUCTOR INDUSTRY
• Table 21 KEY MARKET SEGMENTS AND MATURITY
• Table 21 (CONTINUED)
  • THE MARKET TODAY
    • PRICE
• Table 22 GLOBAL NANOTECHNOLOGY TOOLS AND INSTRUMENTS USER EXPENDITURES, BYMARKET SEGMENT, THROUGH 2008 ($ Millions)
• Figure 4 HISTORICAL YEAR-TO-YEAR AND PROJECTED GROWTH RATES INEXPENDITURES ON NANOTECHNOLOGY INSTRUMENTS AND TOOLS (%)
  • MARKET SIZE
  • Market Drivers
  • Investment
• Figure 5 GROWTH OF INVESTMENT IN NANOTECHNOLOGY IN THE U.S. BY INVESTORTYPE, 2002-2008 ($ BILLIONS)
• Figure 6 DISTRIBUTION OF U.S. INVESTMENT FUNDING IN NANOTECHNOLOGY,1998-2003 (%)
  • Historical Sector Growth and Technology Market Penetration
• Table 23 GLOBAL NANOTECHNOLOGY INSTRUMENTS AND TOOLS MARKETS, BY SEGMENT,THROUGH 2008 ($ MILLIONS)
  • MICROSCOPY MARKET
• Table 24 GLOBAL MARKET FOR MICROSCOPE INSTRUMENTS, EXCLUDING LITHOGRAPHYAND MANIPULATIONS/FABRICATION SYSTEMS, THROUGH 2008 ($ MILLIONS)
  • NANOLITHOGRAPHY
• Table 25 GLOBAL MARKET FOR NANOLITHOGRAPHY SYSTEMS BY TYPE, THROUGH 2008($ MILLIONS)
  • NANOMANIPULATION AND FABRICATION
• Table 26 TOOLS FOR NANOMANIPULATION AND FABRICATION, THROUGH 2008 ($MILLIONS)
  • SIMULATION AND MODELING TOOLS
• Table 27 GLOBAL MARKET FOR MOLECULAR MODELING AND SIMULATION SOFTWARE FORNANOTECHNOLOGY, THROUGH 2008 ($ MILLIONS)
  • PROBES, TIPS AND ACCESSORIES
• Table 28 GLOBAL MARKET FOR SCANNING PROBES, TIPS AND ACCESSORIES FORNANOTECHNOLOGY INSTRUMENTS AND TOOLS, THROUGH 2008 ($ MILLIONS)
  • TECHNOLOGY DEVELOPMENT
• Table 29 STATUS OF DEVELOPMENT OF NANOTECHNOLOGY INSTRUMENTS AND TOOLSAPPLICATIONS TO INDUSTRY

• VEECO INSTRUMENTS, INC. V. ASYLUM RESEARCH, INC.
• PATENT TRENDS
  • PATENTS BY TECHNOLOGY TYPE
• Table 30 NANOTECHNOLOGY PATENTS, 1988-2003
• Table 30 (CONTINUED)
• Table 30 (CONTINUED)
• Table 30 (CONTINUED)
• Table 30 (CONTINUED)
• Table 30 (CONTINUED)
• Table 30 (CONTINUED)
  • PATENTS BY COMPANY
• Table 31 PATENTS BY COMPANY, 1988-2003
• Table 31 (CONTINUED)
• Table 31 (CONTINUED)
• Table 31 (CONTINUED)
• Table 31 (CONTINUED)
• Table 31 (CONTINUED)
• Table 31 (CONTINUED)
  • MICROSCOPY COMPANY PATENTS
• Table 32 NUMBER OF PATENTS HELD BY SCANNING PROBE MICROSCOPE MANUFACTURERS
  • NANOLITHOGRAPHY SYSTEM COMPANY PATENTS
• Table 33 NUMBER OF PATENTS FOR NANOLITHOGRAPHY SYSTEM MANUFACTURERS
• Table 33 (CONTINUED)
  • NANOMANIPULATION AND POSITIONING SYSTEM COMPANY PATENTS
• Table 34 NUMBER OF PATENTS FOR NANOMANIPULATION AND POSITIONING SYSTEMMANUFACTURERS
  • SIMULATION AND MODELING SOFTWARE COMPANY PATENTS
• Table 35 NUMBER OF PATENTS FOR NANOSCALE SIMULATION, MODELING AND SOFTWAREPRODUCERS
  • PROBE AND TIP COMPANY PATENTS
• Table 36 NUMBER OF PATENTS FOR PROBE AND TIP PRODUCERS

• 3RDTECH
  • TECHNOLOGIES
  • PRODUCTS
• ACCURION LLC
  • TECHNOLOGIES
  • PRODUCTS
• AGFA-GEVAERT N.V.
  • PRODUCTS
• AGUILA TECHNOLOGIES
  • TECHNOLOGIES
  • PRODUCTS
• APTECH SYSTEMS, INC.
  • PRODUCTS
• ARRYX, INC.
  • TECHNOLOGIES
  • PRODUCTS
• ASYLUM RESEARCH
  • PRODUCTS
• ATOMIC FORCE F&E GMBH
  • PRODUCTS
• ATTOCUBE SYSTEMS
  • TECHNOLOGIES
  • PRODUCTS
• BIOFORCE NANOSCIENCES, INC.
  • TECHNOLOGIES
  • PRODUCTS
• BUDGETSENSORS
  • PRODUCTS
• CENS (CENTER FOR NANOSCIENCE)
  • TECHNOLOGIES-PRODUCTS
• CENTER OF EXCELLENCE IN NEW MATERIALS
  • TECHNOLOGIES-PRODUCTS
• CRESTEC CORP.
  • PRODUCTS
• FUTURECAMP GMBH
• GENERAL NANOTECHNOLOGY, LLC
  • TECHNOLOGIES
  • PRODUCTS
• FOCUS GMBH
  • TECHNOLOGIES
  • PRODUCTS
• HITACHI HIGH TECHNOLOGIES CORP.
  • TECHNOLOGIES
  • PRODUCTS
• HITACHI SCIENTIFIC INSTRUMENTS
  • TECHNOLOGIES
  • PRODUCTS
• HYSITRON INC
  • TECHNOLOGIES
  • PRODUCTS
• IBIDI GMBH
  • TECHNOLOGIES
  • PRODUCTS
• INDEPENDENT RESEARCH AND ENGINEERING GROUP
  • TECHNOLOGIES
  • PRODUCTS
• IN TRA CON
  • TECHNOLOGIES
  • PRODUCTS
• JASCO CORP.
  • PRODUCTS
• JEOL, INC.
  • PRODUCTS
• JMAR TECHNOLOGIES, INC.
  • TECHNOLOGIES
  • PRODUCTS
• JPK INSTRUMENTS AG
  • PRODUCTS
• KLEINDIEK NANOTECHNIK
  • TECHNOLOGIES
  • PRODUCTS
• K-TEK INTERNATIONAL INC.
  • PRODUCTS
• LEO ELECTRON MICROSCOPY
  • PRODUCTS
• MAPPER LITHOGRAPHY B.V.
  • TECHNOLOGIES
  • PRODUCTS
• MOLECULAR IMAGING
  • TECHNOLOGIES
  • PRODUCTS
• MOORE NANOTECHNOLOGY SYSTEMS
  • TECHNOLOGIES
  • PRODUCTS
• NANION
  • TECHNOLOGIES
  • PRODUCTS
• NANOANALYTICS GMBH
  • TECHNOLOGIES
  • PRODUCTS
• NANOANDMORE
  • TECHNOLOGIES
  • PRODUCTS
• FIRST NANO, INC. (formerly NanoDevices)
  • TECHNOLOGIES
  • PRODUCTS
• NANOFAB
  • TECHNOLOGIES
  • PRODUCTS
• NANOFACTORY INSTRUMENTS AB
  • PRODUCTS
• NANOFEEL
  • TECHNOLOGIES
  • PRODUCTS
• NANOFOCUS MESSTECHNIK GMBH
  • TECHNOLOGIES
  • PRODUCTS
• NANOINK, INC.
  • TECHNOLOGIES
  • PRODUCTS
• NANO INSTRUMENTS / MTS
  • TECHNOLOGIES
  • PRODUCTS
• NANOMAGNETICS INSTRUMENTS, LTD.
  • TECHNOLOGIES
  • PRODUCTS
• NANOMETRICS, INC.
  • TECHNOLOGIES
  • PRODUCTS
• NANONICS IMAGING LTD.
  • TECHNOLOGIES
  • PRODUCTS
• NANONIS GMBH
  • TECHNOLOGIES
  • PRODUCTS
• NANOSCAPE AG
  • TECHNOLOGIES
  • PRODUCTS
• NANOSENSORS
  • TECHNOLOGIES
  • PRODUCTS
• NANOSURF AG
  • TECHNOLOGIES
  • PRODUCTS
• NANOTOOLS GMBH
  • TECHNOLOGIES
  • PRODUCTS
• NANOWAVE, INC.
  • TECHNOLOGIES
  • PRODUCTS
• NANOWORLD AG
  • PRODUCTS
• NETZSCH
  • TECHNOLOGIES
  • PRODUCTS
• NPOINT
  • TECHNOLOGIES
  • PRODUCTS
• NT-MDT
  • TECHNOLOGIES
  • PRODUCTS
• OMICRON NANOTECHNOLOGY GMBH
  • TECHNOLOGIES
  • PRODUCTS
• PACIFIC NANOTECHNOLOGY, INC.
  • TECHNOLOGIES
  • PRODUCTS
• PVD PRODUCTS, INC.
  • TECHNOLOGIES
  • PRODUCTS
• QUANTISCRIPT, INC.
  • TECHNOLOGIES
  • PRODUCTS
• QUEENSGATE INSTRUMENTS, LTD.
  • TECHNOLOGIES
  • PRODUCTS
• QUESANT INSTRUMENT CORP.
  • TECHNOLOGIES
  • PRODUCTS
• RHK TECHNOLOGY, INC.
  • TECHNOLOGIES
  • PRODUCTS
• REVEO, INC.
  • TECHNOLOGIES
  • PRODUCTS
• SEIKO INSTRUMENTS
  • TECHNOLOGIES
  • PRODUCTS
• SURFACE IMAGING SYSTEMS
  • PRODUCTS
• SWISSPROBE
  • TECHNOLOGIES
  • PRODUCTS
• TRIPLE-O MICROSCOPY
  • PRODUCTS
• TRIXELL
  • TECHNOLOGIES
  • PRODUCTS
• ULTRATECH
  • TECHNOLOGIES
  • PRODUCTS
• VEECO
  • TECHNOLOGIES
  • PRODUCTS
• WITEC INSTRUMENTS CORP.
  • TECHNOLOGIES
  • PRODUCTS
• ZEISS MICROIMAGING
  • PRODUCTS
• ZYGO CORPORATION
  • TECHNOLOGIES
  • PRODUCTS
• ZYVEX CORPORATION
  • TECHNOLOGIES
  • PRODUCTS

• ASSOCIATIONS
• CONFERENCES, 2004
  • CONFERENCES, 2004 (CONTINUED)

LIST OF TABLES

Summary Table:

GLOBAL NANOTECHNOLOGY INSTRUMENTS AND TOOLS SALES, 2000 THROUGH 2008 ($MILLIONS)

Table 1 COMPARATIVE SCANNING MICROSCOPE CAPABILITIES

Table 2 KEY SCANNING MICROSCOPE MANUFACTURERS

Table 3 COMPARATIVE NANOLITHOGRAPHY CAPABILITIES

Table 4 KEY NANOLITHOGRAPHY SYSTEM MANUFACTURERS

Table 5 COMPARATIVE NANOMANIPULATION CAPABILITIES

Table 6 KEY NANOMANIPULATION AND POSITIONING SYSTEM MANUFACTURERS

Table 7 COMPARATIVE NANOSIMULATION CAPABILITIES

Table 8 KEY NANOSCALE SIMULATION, MODELING AND SOFTWARE PRODUCERS

Table 9 COMPARATIVE PROBE CHARACTERISTICS

Table 10 U.S. AND GLOBAL MAJOR NANOTECHNOLOGY MARKET SHARE BY COMPANY,2003 (%)

Table 11 NANOTECHNOLOGY-RELATED ACQUISITIONS BY VEECO

Table 12 ASYLUM RESEARCH NANOTECHNOLOGY PRODUCTS

Table 13 NANOSURF NANOTECHNOLOGY PRODUCTS

Table 14 U.S. AND GLOBAL NANOTECHNOLOGY MICROSCOPY MARKET SHARE BYCOMPANY, 2003 (%)

Table 15 NPOINT NANOTECHNOLOGY PRODUCTS

Table 16 NANOTOOLS NANOTECHNOLOGY PRODUCTS

Table 17 U.S. AND GLOBAL NANOTECHNOLOGY PROBES MARKET SHARE BY COMPANY,2003

Table 18 ARRYX NANOTECHNOLOGY PRODUCTS

Table 19 ZYVEX NANOTECHNOLOGY PRODUCTS

Table 20 U.S. AND GLOBAL NANOTECHNOLOGY MANIPULATION SYSTEMS MARKET SHAREBY COMPANY, 2003

Table 21 KEY MARKET SEGMENTS AND MATURITY

Table 22 GLOBAL NANOTECHNOLOGY TOOLS AND INSTRUMENTS USER EXPENDITURES, BYMARKET SEGMENT, THROUGH 2008 ($ Millions)

Table 23 GLOBAL NANOTECHNOLOGY INSTRUMENTS AND TOOLS MARKETS, BY SEGMENT,THROUGH 2008 ($ MILLIONS)

Table 24 GLOBAL MARKET FOR MICROSCOPE INSTRUMENTS, EXCLUDING LITHOGRAPHYAND MANIPULATIONS/FABRICATION SYSTEMS, THROUGH 2008 ($ MILLIONS)

Table 25 GLOBAL MARKET FOR NANOLITHOGRAPHY SYSTEMS BY TYPE, THROUGH 2008($ MILLIONS)

Table 26 TOOLS FOR NANOMANIPULATION AND FABRICATION, THROUGH 2008 ($MILLIONS)

Table 27 GLOBAL MARKET FOR MOLECULAR MODELING AND SIMULATION SOFTWARE FORNANOTECHNOLOGY, THROUGH 2008 ($ MILLIONS)

Table 28 GLOBAL MARKET FOR SCANNING PROBES, TIPS AND ACCESSORIES FORNANOTECHNOLOGY INSTRUMENTS AND TOOLS, THROUGH 2008 ($ MILLIONS)

Table 29 STATUS OF DEVELOPMENT OF NANOTECHNOLOGY INSTRUMENTS AND TOOLSAPPLICATIONS TO INDUSTRY

Table 30 NANOTECHNOLOGY PATENTS, 1988-2003

Table 31 PATENTS BY COMPANY, 1988-2003

Table 32 NUMBER OF PATENTS HELD BY SCANNING PROBE MICROSCOPE MANUFACTURERS

Table 33 NUMBER OF PATENTS FOR NANOLITHOGRAPHY SYSTEM MANUFACTURERS

Table 34 NUMBER OF PATENTS FOR NANOMANIPULATION AND POSITIONING SYSTEMMANUFACTURERS

Table 35 NUMBER OF PATENTS FOR NANOSCALE SIMULATION, MODELING AND SOFTWAREPRODUCERS

Table 36 NUMBER OF PATENTS FOR PROBE AND TIP PRODUCERS  

LIST OF FIGURES

Summary Figure:

YEAR-TO-YEAR GROWTH IN MENTIONS OF THE WORD "NANOTECHNOLOGY" INTHE PRINT MEDIA, 1999-2003

Figure 1 RELATIVE MATURITY OF INSTRUMENTATION AND TOOLS FOR NANOTECHNOLOGYMARKETS

Figure 2 VEECO, INC., STOCK CHART, 2002-2003

Figure 3 FEI, INC., STOCK CHART, 2002-2003

Figure 4 HISTORICAL YEAR-TO-YEAR AND PROJECTED GROWTH RATES INEXPENDITURES ON NANOTECHNOLOGY INSTRUMENTS AND TOOLS (%)

Figure 5 GROWTH OF INVESTMENT IN NANOTECHNOLOGY IN THE U.S. BY INVESTORTYPE, 2002-2008 ($ BILLIONS)

Figure 6 DISTRIBUTION OF U.S. INVESTMENT FUNDING IN NANOTECHNOLOGY,1998-2003 (%)