Microsensors: MEMS, Biosensors and Nanosensors

SUMMARY

INTRODUCTION

MEMS, biochips, and nano-sensors (referred to collectively in this report as microsensors) are one of the fastest growing technology areas, with sales of more than $2.5 billion in 2007 and expected to grow at a compound annual growth rate (CAGR) of 21.7% between 2008 and 2013.

Microsensors have proven to be a key enabling technology of developments in sectors such as transportation, telecommunications, and health care, but the range of microsensors applications covers nearly every sector. The most significant advantage of microsensors is their ability to communicate easily with semiconductor chips. Other advantages include microsensors' compact size, reduced power consumption, lower cost, and increased reliability. The growth in the use of microsensors has also led to the creation of supporting industries in areas such as design software, design services, specialty fabrication equipment, and fabrication facilities.

The range of microsensor products and applications has grown rapidly in the past few years, but it is important to avoid "hyping" their prospects. Although some types of microsensors (airbag accelerometers, for example) have had great commercial success, other types (such as most types of nanosensors) have at least so far failed to live up to their proponents' expectations. Still other technologies are still at the discovery and development stages, and their eventual commercialization will require the commitment of substantial resources, with long payback periods and substantial financial risk.

To the extent that hype results in exaggerated investor expectation, it can divert investment from microsensor technologies that have real commercial potential. In the worst case, disappointed expectations can lead to a drying-up of investment funds, similar to the one that occurred in the dot-com sector after 2000.

This report takes a hard look at the market for microsensors and tries to provide a road map to the technologies and applications that are likely to enjoy the greatest commercial success in the years through 2013.

SCOPE OF STUDY

This report contains:

• Descriptions of various types of microsensors including microelectromechanical systems (MEMS), biochips and nanosensors
• The current global market status for microsensors, with trends and forecasts for growth over the next 5 years
• Current and developmental microsensor technologies and applications
• Discussion of the challenges that must be overcome for each market segment to reach its potential
• Company profiles.

METHODOLOGY AND INFORMATION SOURCES

The methodologies and assumptions used to develop the market projections in this report are discussed at length under Detailed Market Estimates and Projections. The report carefully documents data sources and assumptions. This way, readers can see how the market estimates were developed and, if they so desire, test the impact on the final numbers of changing assumptions such as price.

The third phase focused on quantifying the potential market for each short-listed microsensor technology and identifying the main prerequisites for commercial success.

TABLE OF CONTENTS

• Microsensors: MEMS, Biosensors and Nanosensors
• Chapter 1 - EXECUTIVE SUMMARY
  • SUMMARY TABLE: GLOBAL MICROSENSOR MARKET PROJECTIONS, THROUGH 2013 ($ MILLIONS)
  • SUMMARY FIGURE: GLOBAL MICROSENSOR MARKET PROJECTIONS, 2007-2013 ($ MILLIONS)
• Chapter 2 - MICROSENSORS OVERVIEW
  • GENERAL DESCRIPTION
    • DEFINTIONS
  • Sensors
  • Microsensors
    • MEMS
  • Biochips
  • Nanosensors
• HISTORICAL PERSPECTIVE
• MICROSENSOR TECHNOLOGIES AND APPLICATIONS
  • TABLE 1 MAJOR MICROSENSOR TECHNOLOGIES AND APPLICATIONS
  • TABLE 1 (CONTINUED)
    • ACCELEROMETERS
    • GYROSCOPES
    • PRESSURE MICROSENSORS
    • CHEMICAL AND GAS MICROSENSORS
    • THERMAL MICROSENSORS
    • BIOCHIPS
    • NANO-CHEMICAL SENSORS
    • NANO-BIOSENSORS
    • NANO-RADIATION SENSORS
    • NANO-THERMAL SENSORS
    • MICROSENSOR MARKETS
  • TABLE 2 GLOBAL MICROSENSOR MARKET PROJECTIONS, THROUGH 2013 ($ MILLIONS)
  • FIGURE 1 PROJECTED GLOBAL MICRO MARKET TRENDS, 2007-2013 ($ MILLIONS)
  • TABLE 3 PROJECTED LARGEST SELLING TYPES OF MICROSENSORS, 2007 VS. 2013
  • TABLE 3 (CONTINUED)
  • TABLE 4 GLOBAL MARKET PROJECTIONS FOR MICROSENSORS BY END USE, THROUGH 2013 ($ MILLIONS)
  • FIGURE 2 PROJECTED TRENDS IN THE GLOBAL MICROSENSOR MARKET BY END-USER SEGMENT, 2007-2013 (PERCENT OF TOTAL SALES)
• Chapter 3 - ENABLING TECHNOLOGIES FOR MICROSENSORS
• MATERIALS TECHNOLOGIES
  • FIGURE 3 GLOBAL MARKET SHARE PROJECTIONS FOR MICROSENSOR MATERIALS TECHNOLOGIES BY TYPE, 2007 AND 2013 (PERCENT OF TOTAL MEMS SHIPMENTS)
  • FIGURE 3 (CONTINUED)
    • SILICON
    • POLYMERS
    • METALS
    • NANOMATERIALS
      • Carbon Nanotubes
      • Nanoribbons
      • Nanowires
      • Nanoceramics
  • MANUFACTURING TECHNOLOGIES
  • MICROMACHINING
    • Surface Micromachining
  • FIGURE 4 SACRIFICIAL LAYER ETCHING
    • Bulk Micromachining
    • LIGA
  • FIGURE 5 LIGA PROCESS DIAGRAM
    • Wafer Bonding
      • Anodic Bonding
      • Intermediate-Layer Assisted Bonding
      • Direct Bonding
      • Flip-Chip Bonding
  • ETCHING
    • Wet Anisotropic Etching
  • FIGURE 6 ISOTROPIC VS. ANISOTROPIC ETCHING
    • Dry Etching
      • Reactive Ion Etching
      • Deep Reactive Ion Etching
    • LASER MICROFABRICATION
      • Laser Micromachining
      • Laser-Assisted Chemical Etching
      • Laser Assisted Deposition
      • Stereolithography
      • Laser Surface Modification
      • Laser-Assisted Manipulation and Assembly
        • Laser Microbending
        • Physical Manipulation of Parts
        • Laser Joining
  • NANOPATTERNING
    • Nanoimprint Lithography
      • Hot Embossing Lithography
      • Ultraviolet Nanoimprint Lithography
      • Microcontact Printing
    • Dip Pen Nanolithography
      • Dip Pen Nanolithography (Continued)
    • Laser-Based Particle Deposition
• Chapter 4 - ACCELEROMETERS
  • TECHNOLOGIES
    • OPERATING MECHANISM
  • TABLE 5 MAJOR MEMS ACCELEROMETER TECHNOLOGIES
  • TABLE 5 (CONTINUED)
    • Capacitive
    • Electromagnetic
    • Piezoelectric
    • Piezoresistive
    • Optical
    • Tunneling
    • Thermal
  • AXES OF MEASUREMENT
  • LOW-G ACCELEROMETERS
• APPLICATIONS
  • TABLE 6 COMMERCIAL ACCELEROMETER APPLICATIONS
    • AUTOMOTIVE APPLICATIONS
      • Airbag Actuation
      • Stability Systems
      • Vehicle Navigation
  • LIFE SCIENCES
    • Rate-Responsive Heart Pacemakers
    • Actigraphs
  • ENERGY
    • Oil and Gas Exploration
  • MILITARY/AEROSPACE
  • INFORMATION TECHNOLOGY
    • Hard Disk Drop Protection
  • CONSUMER PRODUCTS
    • "Smart" Sporting Goods
    • Mobile Phone Operator Interface
    • Game Controller User Interface
    • Digital Camera Image Stabilization Systems
  • MISCELLANEOUS APPLICATIONS
• ACCELEROMETER MARKET
  • SUMMARY
  • TABLE 7 GLOBAL MARKET PROJECTIONS FOR MEMS ACCELEROMETERS, THROUGH 2013 ($ MILLIONS)
  • FIGURE 7 GLOBAL MEMS ACCLEROMETER MARKET SHARE PROJECTIONS BY APPLICATION SEGMENT, 2007-2013 (PERCENT OF TOTAL SHIPMENTS)
• AUTOMOTIVE APPLICATIONS
  • TABLE 8 GLOBAL MARKET PROJECTIONS FOR ESTABLISHED AUTOMOTIVE ACCELEROMETER APPLICATIONS, THROUGH 2013 ($ MILLIONS)
    • Airbag Sensors
  • TABLE 9 PROJECTED GLOBAL SHIPMENTS OF AIRBAG MODULES, THROUGH 2013 (MILLION UNITS)
  • FIGURE 8 PROJECTED TRENDS IN GLOBAL SHIPMENTS OF AIRBAG MODULES, 2007-2013 (MILLION UNITS)
  • TABLE 10 GLOBAL MARKET PROJECTIONS FOR AIRBAG SENSORS IN MOTOR VEHICLES, THROUGH 2013 (MILLION UNITS/$ MILLIONS)
    • Vehicle Stability Control Systems
  • TABLE 11 PROJECTED GLOBAL PRODUCTION OF VEHICLES EQUIPPED WITH STABILITY CONTROL SYSTEMS, THROUGH 2013 (MILLION VEHICLES)
  • FIGURE 9 PROJECTED TRENDS IN GLOBAL SALES OF LIGHT VEHICLES WITH STABILITY CONTROL SYSTEMS, 2007-2013 (MILLION VEHICLES)
  • TABLE 12 GLOBAL MARKET FOR LOW-G ACCELEROMETERS USED IN VEHICLE STABILITY CONTROL SYSTEMS, THROUGH 2013 (MILLION UNITS/$ MILLIONS)
    • Navigation Systems
  • TABLE 13 PROJECTED GLOBAL SHIPMENTS OF VEHICLE NAVIGATION SYSTEMS WITH INTEGRATED INS, THROUGH 2013 (MILLION VEHICLES)
  • FIGURE 10 PROJECTED TRENDS IN GLOBAL SHIPMENTS OF VEHICLE NAVIGATION SYSTEMS, 2007-2013 (MILLION SYSTEMS SHIPPED)
  • TABLE 14 GLOBAL MARKET PROJECTIONS FOR MEMS ACCELEROMETERS USED IN VEHICLE NAVIGATION SYSTEMS, THROUGH 2013 (MILLION UNITS/$ MILLIONS)
    • LIFE SCIENCES APPLICATIONS
  • TABLE 15 GLOBAL MARKET FOR ESTABLISHED ACCELEROMETER APPLICATIONS IN THE LIFE SCIENCES, THROUGH 2013 ($ MILLIONS)
    • Rate-Responsive Heart Pacemakers
  • TABLE 16 GLOBAL SALES PROJECTIONS FOR CARDIAC PACEMAKERS, THROUGH 2013 (THOUSANDS OF PACEMAKERS)
  • FIGURE 11 PROJECTED TRENDS IN GLOBAL SALES OF CARDIAC PACEMAKERS, 2007-2013 (THOUSAND UNITS)
  • TABLE 17 GLOBAL MARKET PROJECTIONS FOR ACCELEROMETERS USED IN RATE RESPONSIVE HEART PACEMAKERS, THROUGH 2013 (THOUSAND UNITS/$ MILLIONS)
    • Activity Monitoring Systems
  • TABLE 18 GLOBAL MARKET PROJECTIONS FOR ACCELEROMETERS USED IN ACTIGRAPHS, THROUGH 2013 (THOUSAND UNITS/$ MILLIONS)
  • ENERGY
    • Seismic Detection Systems
  • TABLE 19 GLOBAL MARKET PROJECTIONS FOR ACCELEROMETERS USED IN SEISMIC DETECTION EQUIPMENT, THROUGH 2013 (MILLION UNITS/$ MILLIONS)
• MILITARY/AEROSPACE
  • TABLE 20 PROJECTED GLOBAL SALES OF GPS SYSTEMS FOR MILITARY/AEROSPACE APPLICATIONS, THROUGH 2013 ($ MILLIONS)
  • FIGURE 12 PROJECTED TRENDS IN GLOBAL MILITARY/AEROSPACE MARKET FOR GPS SYSTEMS, 2007-2013 ($ MILLIONS)
  • TABLE 21 GLOBAL MARKET PROJECTIONS FOR ACCELEROMETERS USED IN MILITARY/AEROSPACE APPLICATIONS, THROUGH 2013 (THOUSAND UNITS/$ MILLIONS)
    • INFORMATION TECHNOLOGY
      • Hard Disk Drive Drop Protection
  • TABLE 22 GLOBAL MARKET PROJECTIONS FOR HARD DRIVE-EQUIPPED PORTABLE ELECTRONIC DEVICES, THROUGH 2013 (MILLION UNITS)
  • FIGURE 13 PROJECTED GLOBAL TRENDS IN SALES OF HARD DRIVE-EQUIPPED PORTABLE ELECTRONIC DEVICES, 2007-2013 (MILLION DEVICES)
  • TABLE 23 GLOBAL MARKET PROJECTIONS FOR DRIVE DISK PROTECTION APPLICATIONS, THROUGH 2013 (MILLION UNITS/$ MILLIONS)
    • CONSUMER PRODUCTS
  • TABLE 24 GLOBAL MARKET PROJECTIONS FOR MEMS ACCELEROMETERS IN CONSUMER PRODUCTS, THROUGH 2013 ($ MILLIONS)
    • Mobile Phone User Interface
  • TABLE 25 GLOBAL MARKET PROJECTIONS FOR MOBILE PHONE HANDSETS, THROUGH 2013 (MILLIONS OF HANDSETS)
  • FIGURE 14 PROJECTED TRENDS IN GLOBAL SALES OF MOBILE PHONE HANDSETS, 2007-2013 (MILLIONS OF HANDSETS)
  • TABLE 26 GLOBAL MARKET PROJECTIONS FOR MEMS ACCELEROMETERS IN MOBILE PHONE HANDSETS, THROUGH 2013 (MILLION UNITS/$ MILLIONS)
• Electronic Gaming User Interface
  • TABLE 27 GLOBAL MARKET PROJECTIONS FOR MEMS ACCELEROMETERS IN HANDHELD GAMING DEVICES, THROUGH 2013 (MILLION UNITS/$ MILLIONS)
    • Digital Camera Image Stabilization Systems
  • TABLE 28 PROJECTED GLOBAL DIGITAL CAMERA SALES, THROUGH 2013 (MILLION CAMERAS)
  • FIGURE 15 PROJECTED GLOBAL UNIT SALES OF DIGITAL CAMERAS, 2007-2013 (MILLION UNITS)
  • TABLE 29 GLOBAL MARKET PROJECTIONS FOR MEMS ACCLEROMETERS IN DIGITAL CAMERA IMAGE STABILIZATION SYSTEMS, THROUGH 2013 (MILLION UNITS/$ MILLIONS)
    • "Smart" Sporting Goods
  • TABLE 30 GLOBAL MARKET PROJECTIONS FOR MEMS ACCLEROMETERS IN "SMART" SPORTING GOODS, THROUGH 2013 (THOUSAND UNITS/$ MILLIONS)
• OTHER APPLICATIONS
  • TABLE 31 GLOBAL MARKET PROJECTIONS FOR ACCELEROMETERS USED IN OTHER NON-MILITARY APPLICATIONS, THROUGH 2013 (MILLION UNITS/$ MILLIONS)
• Chapter 5 - GYROSCOPES
  • TECHNOLOGIES
  • TABLE 32 MAJOR MEMS GYROSCOPE TECHNOLOGIES
    • TUNING FORK GYROSCOPE
    • WINE GLASS RESONATOR GYROSCOPES
    • RING RESONATOR GYROSCOPES
    • VIBRATING WHEEL
    • SPINNING WHEEL GYROSCOPE
    • MICRO-OPTICAL-ELECTROMECHANICAL SYSTEMS (MOEMS) GYROS
      • Interferometric MOEMS Gyroscope
    • APPLICATIONS
  • TABLE 33 GYROSCOPIC MEMS APPLICATIONS
    • AUTOMOTIVE
      • Vehicle Stabilization Systems
      • Rollover Detection
      • Vehicle Navigation Systems
  • LIFE SCIENCES
    • "Smart" Wheelchairs
  • CONSUMER PRODUCTS
    • Digital Camera Image Stabilization Systems
    • Personal Transportation Devices
    • Robotic Toys
    • Household Robots
  • MILITARY/AEROSPACE
  • OTHER APPLICATIONS
    • Mobile Industrial/Service Robots
  • GYROSCOPE MARKET
    • SUMMARY
  • TABLE 34 GLOBAL MARKET PROJECTIONS FOR MEMS GYROSCOPES, THROUGH 2013 ($ MILLIONS)
  • FIGURE 16 GLOBAL MEMS ACCELEROMETER MARKET SHARE PROJECTIONS BY APPLICATION SEGMENT, 2007-2013 (% OF TOTAL SHIPMENTS)
    • AUTOMOTIVE
  • TABLE 35 GLOBAL MARKET PROJECTIONS FOR GYROSCOPIC MEMS IN AUTOMOTIVE APPLICATIONS, THROUGH 2013 ($ MILLIONS)
    • Stability Control
  • TABLE 36 GLOBAL MARKET PROJECTIONS FOR MEMS GYROSCOPES USED IN VEHICLE STABILITY CONTROL SYSTEMS, THROUGH 2013 (MILLION UNITS/$ MILLIONS)
    • Rollover Detection
  • FIGURE 17 PROJECTED TRENDS IN GLOBAL SALES OF VEHICLES WITH ROLLOVER DETECTION SYSTEMS, 2007-2013 (MILLION UNITS)
  • TABLE 37 GLOBAL MARKET PROJECTIONS FOR MEMS GYROSOCPES USED IN VEHICLE ROLLOVER DETECTION SYSTEMS, THROUGH 2013 (MILLION UNITS/$ MILLIONS)
    • Navigation Systems
  • TABLE 38 GLOBAL MARKET PROJECTIONS FOR MEMS GYROSCOPES USED IN VEHICLE NAVIGATION SYSTEMS, THROUGH 2013 (MILLION UNITS/$ MILLIONS)
    • LIFE SCIENCES
      • "Smart" Wheelchairs
        • "Smart" Wheelchairs (Continued)
  • TABLE 39 GLOBAL MARKET PROJECTIONS FOR MEMS GYROSCOPES IN "SMART" WHEEHLCHAIRS, THROUGH 2013 (THOUSAND UNITS/$ MILLIONS)
    • CONSUMER PRODUCTS
  • TABLE 40 GLOBAL MARKET PROJECTIONS FOR GYROSCOPIC MEMS IN CONSUMER PRODUCTS, THROUGH 2013 ($ MILLIONS)
    • Digital Camera Image Stabilization Systems
  • TABLE 41 GLOBAL MARKET PROJECTIONS FOR MEMS GYROSCOPES IN DIGITAL CAMERA IMAGE STABILIZATION SYSTEMS, THROUGH 2013 (MILLION UNITS/$ MILLIONS)
    • Personal Transportation Devices
  • FIGURE 18 PROJECTED GLOBAL SALES OF SEGWAY HUMAN TRANSPORTERS, 2007-2013 (UNITS)
  • TABLE 42 GLOBAL MARKET PROJECTIONS FOR MEMS GYROSCOPES IN SEGWAY HUMAN TRANSPORTERS, THROUGH 2013 (THOUSAND UNITS/$ MILLIONS)
• MILITARY/AEROSPACE
  • TABLE 43 GLOBAL MARKET PROJECTIONS FOR MEMS GYROSCOPES USED IN MILITARY/AEROSPACE APPLICATIONS, THROUGH 2013 (MILLION UNITS/$ MILLIONS)
    • OTHER APPPLICATIONS
      • Mobile Industrial/ Service Robots
  • FIGURE 19 PROJECTED TRENDS IN GLOBAL SHIPMENTS OF MOBILE INDUSTRIAL/SERVICE ROBOTS, 2007-2013 UNITS)
  • TABLE 44 GLOBAL MARKET PROJECTIONS FOR MEMS GYROSCOPES IN MOBILE INDUSTRIAL/SERVICE ROBOTS, THROUGH 2013 (UNITS/$ MILLIONS)
• Chapter 6 - PRESSURE SENSORS
  • TECHNOLOGY
  • APPLICATIONS
  • TABLE 45 ESTABLISHED PRESSURE SENSING MEMS APPLICATIONS, 2007
    • AUTOMOTIVE APPLICATIONS
      • Manifold Absolute Pressure (Map) Sensors
      • Tire Pressure Sensors
    • LIFE SCIENCES APPLICATIONS
      • Blood Pressure Monitors
      • CONSUMER PRODUCTS
        • Appliance Pressure Sensors
      • OTHER APPLICATIONS
      • PRESSURE SENSOR MARKET
        • SUMMARY
  • TABLE 46 GLOBAL MARKET PROJECTIONS FOR MEMS PRESSURE SENSOR APPLICATIONS, THROUGH 2013 ($ MILLIONS)
  • FIGURE 20 PROJECTED GLOBAL MEMS PRESSURE SENSOR MARKET SHARES BY APPLICATION SEGMENT, 2007-2013 (PERCENT OF TOTAL SHIPMENTS)
    • AUTOMOTIVE
  • TABLE 47 GLOBAL MARKET FOR ESTABLISHED AUTOMOTIVE MEMS PRESSURE SENSOR APPLICATIONS, THROUGH 2013 ($ MILLIONS)
• Manifold Absolute Pressure Sensors
  • TABLE 48 GLOBAL MARKET PROJECTIONS FOR MEMS MANIFOLD ABSOLUTE PRESSURE SENSORS, THROUGH 2013 (MILLION UNITS/$ MILLIONS)
• Tire Pressure Sensors
  • TABLE 49 GLOBAL MARKET PROJECTIONS FOR MEMS TIRE PRESSURE MONITORING SYSTEMS, THROUGH 2013 (MILLION UNITS/$ MILLIONS)
    • LIFE SCIENCES
      • Blood Pressure Monitors
  • TABLE 50 GLOBAL MARKET PROJECTIONS FOR MEMS BLOOD PRESSURE SENSORS, THROUGH 2013 (MILLION UNITS/$ MILLIONS)
    • CONSUMER PRODUCTS
    • Appliance Pressure Sensors
  • TABLE 51 GLOBAL MARKET PROJECTIONS FOR MEMS PRESSURE SENSORS IN HOME APPIANCES, THROUGH 2013 (MILLION UNITS/$ MILLIONS)
• Chapter 7 - CHEMICAL AND GAS SENSORS
  • TECHNOLOGIES
    • ELECTROCHEMICAL SENSORS
    • MASS SENSORS
    • APPLICATIONS
  • TABLE 52 DEVELOPMENTAL MEMS CHEMICAL AND GAS SENSOR APPLICATIONS, 2007
    • AUTOMOTIVE
      • Exhaust and Cabin Air Quality Sensors
    • LIFE SCIENCES
      • Blood Gas Monitors
  • ENVIRONMENTAL PROTECTION
    • Portable/Personal Air Quality Detectors
  • MILITARY/PUBLIC SAFETY
    • Chemical Agent Detectors
  • OTHER APPLICATIONS
    • Industrial Leak Detection and Process Control
  • MARKETS
  • TABLE 53 GLOBAL MEMS CHEMICAL AND GAS SENSOR MARKET PROJECTIONS BY APPLICATION SEGMENT, THROUGH 2013 ($ MILLIONS)
  • FIGURE 21 GLOBAL MEMS CHEMICAL AND GAS SENSOR MARKET SHARE PROJECTIONS BY APPLICATION SEGMENT, 2007-2013 ((PERCENT OF TOTAL SHIPMENTS)
  • AUTOMOTIVE
  • TABLE 54 GLOBAL MARKET PROJECTIONS FOR MEMS GAS SENSORS USED IN AUTOMOTIVE APPLICATIONS, THROUGH 2013 ($ MILLIONS)
• Exhaust Gas and Cabin Air Quality Sensors
  • TABLE 55 PROJECTED NUMBER OF CATALYTIC CONVERTER-EQUIPPED VEHICLES PRODUCED WORLDWIDE, THROUGH 2013 (MILLION UNITS)
  • FIGURE 22 PROJECTED GLOBAL PRODUCTION OF VEHICLES EQUIPPED WITH CATALYTIC CONVERTERS, 2007-2013 (MILLION VEHICLES)
    • LIFE SCIENCES
      • Blood Gas Monitors
  • TABLE 56 PROJECTED GLOBAL SALES OF BLOOD GAS MONITORS, THROUGH 2013 (UNITS)
  • FIGURE 23 PROJECTED TRENDS IN GLOBAL SALES OF BLOOD GAS MONITORS, 2007-2013 (UNITS)
  • TABLE 57 GLOBAL MARKET PROJECTIONS FOR MEMS BLOOD GAS SENSORS, THROUGH 2013 (UNITS/$ MILLIONS)
    • ENVIRONMENTAL PROTECTION
      • Air Quality Monitoring
  • TABLE 58 GLOBAL SALES OF AIR POLLUTION MONITORING EQUIPMENT, THROUGH 2013 ($ BILLIONS)
  • FIGURE 24 PROJECTED GLOBAL AIR POLLUTION MONITORING AND SENSING EQUIPMENT MARKET TRENDS, 2007-2013 ($ BILLIONS)
  • TABLE 59 GLOBAL MARKET PROJECTIONS FOR MEMS USED IN PORTABLE/PERSONAL AIR QUALITY MONITORS, THROUGH 2013 (UNITS/$ MILLIONS)
    • MILITARY/PUBLIC SAFETY
      • Chemical Agent Detectors
  • TABLE 60 GLOBAL MARKET PROJECTIONS FOR MEMS USED IN PORTABLE CW AGENT DETECTORS, THROUGH 2013 (THOUSAND UNITS/$ MILLIONS)
    • PROCESS INDUSTRIES
      • Industrial Process Control and Leak Detection
  • TABLE 61 GLOBAL MARKET PROJECTIONS FOR OTHER TYPES OF MEMS INDUSTRIAL CHEMICAL AND GAS SENSORS, THROUGH 2013 ($ MILLIONS)
• Chapter 8 - THERMAL SENSORS
  • TECHNOLOGIES
    • MICROBOLOMETERS
    • MICROCANTILEVER IR DETECTORS
  • APPLICATIONS
    • AUTOMOTIVE
    • MILITARY/PUBLIC SAFETY
    • OTHER
  • MARKETS
  • TABLE 62 GLOBAL MARKET PROJECTIONS FOR OPTICAL MEMS IN INFRARED SENSORS BY APPLICATION SEGMENT, THROUGH 2013 (THOUSAND UNITS/$ MILLIONS)
  • FIGURE 25 GLOBAL MEMS IR SENSOR MARKET SHARE PROJECTIONS BY APPLICATION SEGMENT, 2007-2013 (% OF TOTAL SHIPMENTS)
    • AUTOMOTIVE
      • Night Vision Systems
  • TABLE 63 GLOBAL AUTOMOTIVE MARKET PROJECTIONS FOR INFRARED MEMS SENSORS, THROUGH 2013 (THOUSAND UNITS/$ MILLIONS)
• Chapter 9 - BIOCHIPS
  • TECHNOLOGIES
    • SAMPLE MANIPULATION TECHNOLOGIES
      • Microchannels
      • Micropumps
        • Mechanical Micropumps
          • Piezoelectric Pumps
          • Pneumatic Pumps
          • Thermopneumatic Pumps
          • Electrostatic Pumps
        • Non-Mechanical Pumps
          • Capillary Pumps
          • Electrohydrodynamic Pumps
          • Electrokinetic Pumps
          • Magneto-Hydrodynamic Pumps
            • Phase Difference Pumps
        • Micronozzles
        • Microvalves
          • Passive Microvalves
          • Active Microvalves
        • Micromixers
          • Active Mixers
            • SAW Mixers
            • Magneto-HydrodynamicMixers
        • Passive Mixer
        • Microreactors
    • SENSING MEDIATOR
      • Enzyme Biochips
      • Affinity Biochips
    • TRANSDUCER
    • APPLICATIONS
  • TABLE 64 BIOCHIP APPLICATIONS
    • LIFE SCIENCES
    • MILITARY/PUBLIC SAFETY
      • Chemical and Biological Agent Detectors
    • PROCESS INDUSTRIES
      • Food Quality Testing
    • MARKETS
  • TABLE 65 GLOBAL BIOCHIP MARKET PROJECTIONS BY APPLICATION SEGMENT, THROUGH 2013 ($ MILLIONS)
  • FIGURE 26 GLOBAL BIOCHIP MARKET SHARE PROJECTIONS BY APPLICATION SEGMENT, 2007-2013 (% OF TOTAL SHIPMENTS)
    • LIFE SCIENCES
  • TABLE 66 GLOBAL MARKET PROJECTIONS FOR BIOCHIPS IN THE LIFE SCIENCES BY APPLICATION, THROUGH 2013 ($ MILLIONS)
    • Life Sciences Research
  • TABLE 67 GLOBAL MARKET PROJECTIONS FOR BIOCHIPS USED IN LIFE SCIENCE RESEARCH APPLICATIONS, THROUGH 2013 ($ MILLIONS)
    • Diagnostic Biochips
  • TABLE 68 GLOBAL MARKET PROJECTIONS FOR BIOCHIPS IN LOC DIAGNOSTIC DEVICES, THROUGH 2013 ($ MILLIONS)
    • MILITARY/PUBLIC SAFETY
  • TABLE 69 GLOBAL MARKET PROJECTIONS FOR MICROFLUIDIC BIOCHIPS USED IN CBW SENSORS, THROUGH 2013 ($ MILLIONS)
    • PROCESS INDUSTRIES
      • Food Testing
  • TABLE 70 GLOBAL MARKET PROJECTIONS FOR BIOCHIPS USED IN FOOD TESTING APPLICATIONS, THROUGH 2013 ($ MILLIONS)
• Chapter 10 - NANO-CHEMICAL SENSORS
  • TECHNOLOGIES
  • TABLE 71 NANO-CHEMICAL SENSOR TECHNOLOGIES
    • NANOTUBES
      • Carbon Nanotubes
      • Other Types of Nanotubes
    • NANORIBBONS
    • NANOWIRES
    • NANO-CANTILEVERS
    • NANO-PARTICLES
    • NANOCERAMICS
      • APPLICATIONS
  • TABLE 72 NANO-CHEMICAL SENSOR APPLICATIONS
  • TABLE 72 (CONTINUED)
    • LIFE SCIENCES
      • Respiratory Monitoring
    • PROCESS INDUSTRIES
      • Leak Detection
    • MARKET
  • TABLE 73 GLOBAL SALES PROJECTIONS OF NANOCHEMICAL SENSORS BY APPLICATION SEGMENT, THROUGH 2013 ($ MILLIONS)
    • LIFE SCIENCES
      • Respiratory Monitors
  • TABLE 74 GLOBAL SALES PROJECTIONS FOR SPIROMETERS AND CAPNOMETERS, THROUGH 2013 ($ MILLIONS)
  • TABLE 75 GLOBAL MARKET FOR NANO-CHEMICAL SENSORS IN RESPIRATORY MONITORING APPLICATIONS, THROUGH 2013 ($ MILLIONS)
• PROCESS INDUSTRIES
  • TABLE 76 GLOBAL MARKET PROJECTIONS FOR NANO-CHEMICAL SENSORS IN PROCESS INDUSTRIES, THROUGH 2013 ($ MILLIONS)
• Chapter 11 - NANO-BIOSENSORS
  • TECHNOLOGIES
  • TABLE 77 NANO-BIOSENSOR TECHNOLOGIES
    • SILICON NANOWIRES
    • NANO-CANTILEVERS
    • FIBER OPTIC
    • NANOTUBES
    • NANOSTRUCTURED MEMBRANE
    • PHOSPHOLIPIDS
    • APPLICATIONS
  • TABLE 78 NANO-BIOSENSOR APPLICATIONS
    • LIFE SCIENCES
      • Molecular Diagnostics
      • Blood Analysis
    • MARKETS
      • LIFE SCIENCES
  • TABLE 79 PROJECTED GLOBAL SALES OF NANO-BIOSENSORS TO THE LIFE SCIENCES MARKET, THROUGH 2013 ($ MILLIONS)
    • Molecular Diagnostics
  • FIGURE 27 GLOBAL MARKET SHARE PROJECTIONS FOR IN VITRO MOLECULAR DIAGNOSTIC EQUIPMENT VS. CONSUMABLES, 2007 (%)
  • FIGURE 28 GLOBAL MARKET PROJECTIONS FOR IN VITRO MOLECULAR DIAGNOSTICS, 2007-2013 ($ BILLIONS)
  • TABLE 80 GLOBAL MARKET PROJECTIONS FOR NANO-BIOSENSOR POINT- OF-CARE MOLECULAR DIAGNOSTIC EQUIPMENT, THROUGH 2013 ($ MILLIONS)
    • Glucose Monitoring
  • FIGURE 29 GLOBAL MARKET PROJECTIONS FOR GLUCOSE TEST STRIPS, 2007-2013 ($ BILLIONS)
  • FIGURE 29 (CONTINUED)
  • TABLE 81 GLOBAL MARKET PROJECTIONS FOR CARBON NANOTUBE GLUCOSE TEST STRIPS, THROUGH 2013 ($ MILLIONS)
• Chapter 12 - NANO-RADIATION SENSORS
  • TECHNOLOGIES
    • NANOCANTILEVER TECHNOLOGY
  • APPLICATIONS
  • TABLE 82 NANO-RADIATION SENSOR APPLICATIONS
    • MARKET
• Chapter 13 - NANO-THERMAL SENSORS
  • TECHNOLOGIES
    • NANOPOWDER-BASED SENSORS
  • MARKETS
  • APPLICATIONS
  • TABLE 83 NANO-THERMAL SENSOR APPLICATIONS
• Chapter 14 - INDUSTRY CHARACTERISTICS
  • NUMBER/SIZE OF FIRMS
  • FIGURE 30 GLOBAL MICROSENSOR INDUSTRY CONCENTRATION, 2007 (PERCENT OF TOTAL MICROSENSOR SHIPMENTS)
  • FIGURE 30 (CONTINUED)
    • MARKET SHARES
  • FIGURE 31 OVERALL GLOBAL MEMS MARKET SHARES BY COMPANY, 2007 (PERCENT OF TOTAL MICROSENSOR SHIPMENTS)
  • FIGURE 31 (CONTINUED)
• Chapter 15 - APPENDIX I: COMPANY PROFILES
  • AFFYMETRIX, INC.
  • ANALOG DEVICES, INC.
  • ARCHANGEL SYSTEMS, INC.
  • ROBERT BOSCH GMBH
  • BOSTON MICROSYSTEMS, INC.
  • CALIPER LIFE SCIENCES
  • CEPHEID THERAPEUTICS
  • CIPHERGEN, INC.
  • COLYBRYS SA
  • COMBIMATRIX CORP.
  • CONTINENTAL TEVES AG & CO. OHG
  • CUSTOM SENSORS AND TECHNOLOGIES
  • DELPHI CORP.
  • ENDEVCO CORP.
  • ENZO LIFE SCIENCES
  • EUROGENTEC
  • FEBIT AG
  • FLIR SYSTEMS, INC.
  • FREESCALE SEMICONDUCTOR, INC.
  • GE SENSING
  • GENETIX, LTD.
  • GMA INDUSTRIES, INC.
  • ICX PHOTONICS
  • INTEGRATED NANO-TECHNOLOGIES, LLC
  • I-STAT CORP.
  • KIONIX, INC.
  • KNOWLES ELECTRONICS
  • LOCKHEED MARTIN CORP.
  • MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD.
  • M-BIOTECH, INC.
  • MEASUREMENT SPECIALTIES, INC.
  • MEMSIC, INC.
  • MICROCHEMICAL SYSTEMS SA
  • MOLECULAR NANOSYSTEMS, INC.
  • MURATA MANUFACTURING CO., LTD.
  • NANOGEN, INC.
  • NANOMIX, INC.
  • NIMBLEGEN SYSTEMS, INC.
  • NIPPON DENSO CORP.
  • OMRON CORP.
  • SENSONOR AS
  • SILICON DESIGNS, INC.
  • SILICON SENSING SYSTEMS
  • SONY CORP.
  • SPHERE MEDICAL, LTD.
  • STMICROELECTRONICS
  • SYNKERA TECHNOLOGIES, INC.
  • TOSHIBA CORP.
  • ULIS
  • VTI TECHNOLOGIES OY
  • XEOTRON CORP.
• Chapter 16 - APPENDIX II: PATENT ANALYSIS
  • PATENTS BY TYPE OF MEMS
  • FIGURE 32 RECENT U.S. MICROSENSOR-RELATED PATENTS BY TYPE OF SENSOR (PERCENT ISSUED SINCE JANUARY 1, 2005)
  • FIGURE 32 (CONTINUED)
    • MEMS PATENT ASSIGNEES
      • LARGEST PATENT HOLDERS
  • TABLE 84 LARGEST U.S. MICROSENSOR HOLDERS (NUMBER OF PATENTS ISSUED BETWEEN 1/1/2005 AND 3/7/2008)
    • PATENT HOLDERS BY NATIONALITY
  • FIGURE 33 U.S. MICROSENSOR PATENTS BY NATIONALITY OF MICROSENSOR ASSIGNEE (PERCENT OF PATENTS ISSUED BETWEEN 1/1/2005 AND 3/7/2008)