Thin-layer Deposition: CVD, Ion Implantation & Epitaxy

SUMMARY

INTRODUCTION

BCC Research's goal in conducting this study was to determine the current status of the global market for chemical vapor deposition (CVD), ion implantation, and molecular beam epitaxy (MBE) equipment, as well as materials deposited and services. Our intention was to assess the growth potential of these thin film technologies over a period ranging from 2007 to 2013. We were particularly interested in the types of equipment and materials being used for consumer and industrial applications. BCC Research has recently published studies regarding physical vapor deposition (PVD) and atomic layer deposition (ALD). This study is intended to complete the analysis of these three thin film technologies. Studies concerning CVD, ion implantation, and MBE were completed 5 years ago.

The major objective of this study is to present a comprehensive analysis of these remaining thin film technologies and project their future course.

SCOPE OF STUDY

This report contains:

• Descriptions of various thin film technologies including chemical vapor deposition (CVD), ion implantation and molecular beam epitaxy (MBE)
• Discussion of the advantages and limitations of each technology
• The current market status for CVD, ion implantation and MBE, with trends and forecasts for growth over the next 5 years
• Domestic and international technological issues
• Analysis of the industry\'s manufacturing capacity and consumption by various regional markets
• Industry structure and company profiles.

METHODOLOGY

Primary and secondary research methods were used to collect data and information for this report. This BCC Research report presents an analysis of the value of these three thin film systems, materials deposited, and services provided by type of technology, material, and industry segment. The estimated value is the amount that manufacturers and service providers have paid in current dollars. Based on our surveys, we then analyze industry growth in relation to the growth of each thin film technology, calculate estimates of growth, and forecast shipments to 2013.

INFORMATION SOURCES

BCC interviewed approximately 120 companies to obtain data for this report. Included were manufacturers of CVD, ion implantation, and MBE equipment, as well as material suppliers, deposition service providers, industrial and consumer product manufacturing companies, and various end users of products manufactured using these processes. Additional data were obtained from government information, trade associations, industry and financial sources, and an exhaustive review of technical literature.

ANALYST CREDENTIALS

Robert H. Moran has written extensively as a research analyst and editor at BCC Research. The topics of his reports range from various deposition technologies to photovoltaics and solid state lighting. Mr. Moran has been writing for BCC Research for more than 20 years. He holds Bachelor of Science degree in Economics from the University of Pennsylvania.

REPORT HIGHLIGHTS

• The global market for chemical vapor deposition (CVD) will increase from $7.0 billion in 2007 to an estimated $7.3 billion by the end of 2008. It should reach $11.8 billion by 2013, a compound annual growth rate (CAGR) of 10.2%.
• The ion implantation segment will grow at a CAGR of 10.1% between 2008 and 2013 and be worth $4.4 billion by the end of the study period.

Molecular beam epitaxy (mbe) equipment is expected to reach $475.4 million in 2008. It is projected to grow at an 8.1% cagr through the end of the forecast period to reach $701.3 million by 2013.

TABLE OF CONTENTS

Chapter- 1: SUMMARY

• SUMMARY TABLE: VALUE OF GLOBAL CVD, ION IMPLANTATION, AND EPITAXY MARKETS, THROUGH 2013 ($ MILLIONS)
• SUMMARY FIGURE: GLOBAL VALUE OF THE CVD, ION IMPLANTATION, AND EPITAXY MARKETS, THROUGH 2013 ($ MILLIONS)

Chapter- 2: OVERVIEW

• THIN FILM DEPOSITION PROCESS STATUS
  • TABLE 1 STATUS OF MAJOR DEPOSITION STUDIES BY BCC RESEARCH
• DEPOSITION TECHNOLOGIES COVERED IN THIS REPORT
  • TABLE 2 KEY THIN FILM TECHNOLOGIES INCLUDED
• MAJOR APPLICATIONS
  • TABLE 3 KEY APPLICATIONS OF THIN FILM TECHNOLOGIES BY MARKET
• CLASSIFICATION OF MATERIALS
  • TABLE 4 TYPICAL MATERIALS AND THEIR APPLICATIONS

Chapter- 3: INDUSTRY STRUCTURE

• INDUSTRY STRUCTURE
  • TABLE 5 KEY COMPANIES IN THE CVD, ION IMPLANTATION, AND EPITAXY BUSINESS
  • TABLE 5 (CONTINUED)
• THIN FILM INDUSTRY CHANGES
• TECHNOLOGY CONTINUES TO EXPAND IN CHINA
• MERGER AND ACQUISITION TREND CONTINUES
• GLOBAL CVD, ION IMPLANTATION, AND EPITAXY MANUFACTURING
  • TABLE 6 ESTMATED GLOBAL MANUFACTURING OFCVD, ION IMPLANTATION, AND EPITAXY EQUIPMENT (%)
  • FIGURE 1 ESTIMATED GLOBAL CVD, ION IMPLANTATION, AND EPITAXY MANUFACTURING, 2007-2013 (%)
• GLOBAL CONSUMPTION OF CVD, ION IMPLANTATION, AND EPITAXY EQUIPMENT
  • TABLE 7 GLOBAL SHARE OF CVD, ION IMPLANTATION, AND EPITAXY CONSUMPTION, 2007-2013 (%)
  • FIGURE 2 GLOBAL SHARE OF CVD, ION IMPLANTATION, AND EPITAXY CONSUMPTION, 2007-2013 (%)
• MARKET SHARES
  • TABLE 8 MARKET SHARES OF GLOBAL CVD, ION IMPLANTATION, AND EPITAXY MANUFACTURERS, 2007
• COMPANY PROFILES
  • AIXTRON, AACHEN, GERMANY
  • AMEC INC., SHANGHAI, CHINA
  • APPLIED MATERIALS, INC., SANTA CLARA, CA
  • ASM INTERNATIONAL, THE NETHERLANDS
  • CVD EQUIPMENT CORPORATION, RONKOKOMA, NY
  • IBIS TECHNOLOGY CORPORATION, DANVERS, MA
  • IMPLANT SCIENCES CORPORATION, WAKEFIELD, MA.
  • NOVELLUS SYSTEMS, INC., SAN JOSE, CA
  • OERLIKON BALZERS, KOLN, GERMANY
  • OXFORD INSTRUMENTS, OXON, UNITED KINGDOM
  • RIBER COPORATION, BEZONS CEDEX, FRANCE
  • RICHTER PRECISION, INC., EAST PETERSBURG, PA
  • TOKYO ELECTRON LIMITED, TOKYO, JAPAN
  • ULVAC TECHNOLOGIES, INC., METHUEN, MASSACHUSETTS
  • VARIAN SEMICONDUCTOREQUIPMENT ASSOCIATES, GLOUCESTER, MA
  • VEECO INSTRUMENTS, INC., WOODBURY, NY

Chapter- 4: THIN FILM TECHNOLOGY

• CVD TECHNOLOGY
• BASIC THERMAL CVD
  • TABLE 9 KEY TECHNICAL ADVANTAGES OF THE CVD PROCESS
• Coating Technology
• METALLO-ORGANIC CVD
  • TABLE 10 KEY TECHNICAL ADVANTAGES OF MOCVD
• ATMOSPHERIC PRESSURE CVD
  • TABLE 11 MAJOR ADVANTAGES OF THE APCVD PROCESS
• LOW-PRESSURE CVD
• PLASMA-ENHANCED CVD
  • TABLE 12 KEY ADVANTAGES OF PLASMA-ENHANCED CVD
• HIGH-DENSITY PLASMA CVD
  • TABLE 13 MAJOR TECHNICAL ADVANTAGES OF HDP-CVD
• TEOS Ozone Chemistry
  • TABLE 14 KEY TECHNICAL ADVANTAGES OF TEOS/OZONE CHEMISTRY
• DEVELOPMENTS THAT ARE EXPANDING CVD
• CARBON NANOTUBES AND CVD
• CLUSTER TOOLS
• Definition
• Advantages
  • TABLE 15 TECHNICAL ADVANTAGES OF CLUSTER TOOLS
• ION IMPLANTATION TECHNOLOGY
  • TABLE 16 KEY TECHNICAL ADVANTAGES OF ION IMPLANTATION
• BEAMLINE ION IMPLANTATION
  • TABLE 17 KEY ADVANTAGES OF BEAMLINE IMPLANTATION
• PLASMA IMMERSION ION IMPLANTATION (PIII)
  • TABLE 18 KEY ADVANTAGES OF PIII
• ION-ASSISTED DEPOSITION
• Ion Beam-Assisted Deposition (IBAD)
  • TABLE 19 KEY TECHNICAL ADVANTAGES OF IBAD/PIIID
• EPITAXY
• MOLECULAR BEAM EPITAXY (MBE)
  • TABLE 20 MAJOR TECHNICAL ADVANTAGES OF MBE
• Metal Organic Chemical Vapor Deposition (MOCVD)
• DEVELOPMENTS THAT COULD EXPAND ION IMPLANTATION AND EPITAXY
  • TABLE 21 DEVELOPMENTS THAT COULD EXPAND THE USE OF ION IMPLANTATION AND EPITAXY
• ANALYSIS OF PATENTS FOR CVD, ION IMPLANTATION, AND EPITAXY
• PATENTS BY TECHNICAL TOPIC
  • TABLE 22 THIN FILM PRODUCT PATENTS BY TECHICAL TOPIC, 2005-2007
• PATENTS BY GLOBAL REGION
  • TABLE 23 CVD, ION IMPLANTATION, AND EPITAXY-RELATED PATENTS BY REGION, 2005-2007
• PATENTS BY ASSIGNEES
  • TABLE 24 ASSIGNEES WITH THREE OR MORE PATENTS
  • TABLE 24 (CONTINUED)
• SAMPLE PATENT ABSTRACTS
• CVD Method for Depositing a High-k Dielectric Film
• Fabricating Semiconductor Structures with Epitaxially Grown Source and Drain Structures
• Ion Implantation System with an Interlock Function
• Ion Implantation used in Silicon-in-insulator Wafer Transfer Process
• Fabricating Nitride-based Transistors with a Protective Layer and a Low Damage Recess
• Multicomponent Barrier Layers in Quantum Well Active Regions Enhance Confinement and Speed
• Multicomponent Barrier A

Chapter- 5: CVD, ION IMPLANTATION, AND EPITAXY MARKETS

• INDUSTRY APPROACH
• INDUSTRY COMPETITIVENESS
• MEASUREMENT OBJECTIVES

Chapter- 6: CVD, ION IMPLANTATION, AND EPITAXY IN THE MICROELECTRONICS MARKET

• CVD, ION IMPLANTATION, AND EPITAXY
• MICROELECTRONICS PRODUCT DEFINITON
• TABLE 25 BASIC PRODUCTS USING CVD, ION IMPLANTATION, AND EPITAXY PRODUCTS
• CHANGING PRODUCT CHARACTERISTICS
  • TABLE 26 INTEGRATED CIRCUIT CHARACTERISTICS
• INDUSTRY COMPETITIVENESS OF THIN FILM PROCESSES IN MICROELECTRONICS
• ECONOMIC CONDITIONS IN MICROELETRONICS
  • TABLE 27 GLOBAL DEMAND FOR KEY MICROELECTRONIC PRODUCTS BY TYPE, THROUGH 2007 ($ BILLIONS)
• THIN FILM PRODUCT DEVELOPMENT AND STANDARDS
• SEMI
• Impact of Globalization
• Standards
  • TABLE 28 KEY ADVANTAGES OF STANDARDS
• SEMATECH
• Importance to Thin Film Equipment
• International Technology Roadmap for Semiconductors (ITRS)
• The Semiconductor Industry Association
  • TABLE 29 CHALLENGES FOR THE SIA
• GLOBAL ECONOMIC ENVIRONMENT
• Continued Chip Industry Growth Seen by Many
  • TABLE 30 ECONOMIC IMPACT ON CHIP INDUSTRY, 2008
• TECHNOLOGY ADVANCES
• CVD Metal Fill Technology
• Using Epitaxy to Extend CMOS
• MICROELECTRONICS COMPETITIVENSS FACTORS
• Driving Force for CVD, Ion Implantation, and Epitaxy
• Impact of Market Growth Factors
  • TABLE 31 IMPACT OF MAJOR FACTORS ON THE GROWTH OF CVD, ION IMPLANTATION, AND EPITAXY IN THE MICROELECTRONICS INDUSTRY (%)
• SEMICONDUCTOR APPLICATIONS FOR CVD
• MICROELECTRONIC MARKET SEGMENTS
• CVD APPLICATIONS
  • TABLE 32 BASIC/EMERGING CVD SEMICONDUCTOR APPLICATIONS
• Changes in Applications with Copper
• Dielectric Processing Options
  • TABLE 33 CHANGING APPLICATIONS OF CVD FOR SEMICONDUCTORS
• Impact of Larger Wafer Sizes
• New Applications-MEMS Devices and Nanotechnology
  • TABLE 34 ADVANTAGES OF CVD IN MAKING CARBON NANOTUBES
• IMPLANTATION APPLICATIONS FOR SEMICONDUCTORS
  • TABLE 35 SEMICONDUCTOR APPLICATIONS OF ION IMPLANTATION
• Doping of Integrated Circuits
  • TABLE 36 DOPANT SPECIES USED IN CMOS IMPLANTS
• Plasma Doping
• Silicon-on-Insulator Technology
• Hydrogen Implantation and Wafer Bonding
• Oxygen Implantation (SIMOX)
• Other Semiconductor Applications
• EPITAXY APPLICATIONS FOR SEMICONDUCTORS
• MOCVD for Silicon Wafers
• MBE Applications
  • TABLE 37 COMPOUND SEMICONDUCTOR DEVICES MANUFACTURED BY MBE
• Quantum Well Lasers
• KEY MATERIALS USED IN SEMICONDUCTOR APPLICATIONS
• CVD MATERIALS
  • TABLE 38 MAJOR MATERIALS DEPOSITED BY CVD IN THE FABRICATION OF SEMICONDUCTORS
• Dielectrics
• Conductors
• ION IMPLANTATION MATERIALS
  • TABLE 39 KEY MATERIALS USED FOR ION IMPLANTATION IN SEMICONDUCTOR FABRICATION
• MBE MATERIALS
• TABLE 40 TYPICAL MATERIALS USED IN MBE OPERATIONS
• SEMICONDUCTOR MARKET DRIVERS AND TRENDS
• THIN FILM EQUIPMENT DEMAND
• CMOS Business Model
• Fluctuating Growth Trends
  • TABLE 41 GLOBAL GROWTH TREND FOR SEMICONDUCTORS AND THIN FILM EQUIPMENT, THROUGH 2007 (VALUE AND PERCENTAGE RATIO)
• CVD
• ION IMPLANTATION
• MBE
• OTHER MICROELECTRONIC APPLICATIONS
• COMPONENTS
• FLAT-PANEL DISPLAYS
• LIGHT-EMITTING DIODES
  • TABLE 42 OVERVIEW OF OTHER MICROELECTRONIC APPLICATIONS FOR THIN FILM EQUIPMENT
• Market Drivers for Other Microelectronic Products
• FORECAST ASSUMPTIONS-CVD, ION IMPLANTATION, AND EPITAXY IN MICROELECTRONICS
  • TABLE 43 FORECAST ASSUMPTIONS: THIN FILM GROWTH IN THE MICROELECTRONICS INDUSTRY
  • TABLE 43 (CONTINUED)
  • TABLE 44 PROJECTED GLOBAL GROWTH TREND FOR CVD, ION IMPLANTATION, AND EPITAXY THIN FILM TECHNOLOGIES, THROUGH 2013 (VALUE AND PERCENTAGE RATIO)
• FORECAST-VALUE OF CVD SHIPMENTS
  • TABLE 45 VALUE OF GLOBAL CVD EQEUIPMENT SHIPMENTS FOR THE MICROELECTRONICS INDUSTRY, THROUGH 2013 ($ MILLIONS)
  • FIGURE 3 GLOBAL CVD SHIPMENTS FOR MICROELECTRONICS ($ MILLIONS)
• FORECAST-VALUE OF IMPLANTATION EQUIPMENT SHIPMENTS
  • TABLE 46 FORECAST-VALUE OF GLOBAL IMPLANTATION EQUIPMENT FOR THE MICROELECTRONICS MARKET, THROUGH 2013 ($ MILLIONS)
  • FIGURE 4 GLOBAL SHIPMENT VALUE OF ION IMPLANTATION EQUIPMENT FOR MICROELECTRONICS ($ MILLIONS)
• FORECAST-VALUE OF MBE EQUIPMENT SHIPMENTS
  • TABLE 47 FORECAST-GLOBAL VALUE OF MBE SHIPMENTS FOR MICROELECTRONIC APPLICATIONS, THROUGH 2013 ($ MILLIONS)
  • FIGURE 5 GLOBAL VALUE OF MBE EQUIPMENT FOR MICROELECTRONICS, 2007-2013 ($ MILLIONS)
• FORECAST-VALUE OF DEPOSITED CVD MATERIALS
• Measurement Considerations
  • TABLE 48 GLOBAL VALUE OF MATERIALS DEPOSITED BY CVD IN THE MICROELECTRONICS INDUSTRY, THROUGH 2013 ($ MILLIONS)
  • FIGURE 6 GLOBAL VALUE OF MATERIALS DEPOSITED BY CVD, 2007-2013 ($ MILLIONS)
• FORECAST-VALUE OF ION IMPLANTATION MATERIALS
  • TABLE 49 GLOBAL VALUE OF MATERIALS USED FOR IMPLANTATION IN THE MICROELECTRONICS MARKET, THROUGH 2013 ($ THOUSANDS)
  • FIGURE 7 GLOBAL VALUE OF MATERIALS IMPLANTED IN THE MICROELECTRONICS MARKET, 2007-2013 ($ THOUSANDS)
• FORECAST-VALUE OF MBE MATERIALS
  • TABLE 50 GLOBAL VALUE OF MATERIALS USED FOR MBE IN THE MICROELECTRONICS MARKET, THROUGH 2013 ($ MILLIONS)
  • FIGURE 8 GLOBAL VALUE OF MATERIALS CONSUMED BY MBE BY THE MICROELECTRONICS INDUSTRY, 2007-2013 ($ MILLIONS)
• FORECAST-VALUE OF THIN FILM EQUIPMENT SERVICES
  • TABLE 51 VALUE OF GLOBAL CVD, ION IMPLANTATION, AND EPITAXY SERVICES IN THE MICROELECTRONICS INDUSTRY, THROUGH 2013 ($ MILLIONS)
• SUMMARY
  • TABLE 52 SUMMARY OF GLOBAL CVD, ION IMPLANTATION, AND EPITAXY SHIPMENTS, MATERIALS AND SERVICES FOR MICROELECTRONICS, THROUGH 2013 ($ MILLIONS)
• Summary (Continued)

Chapter- 7: CVD AND ION IMPLANTATION IN THE MEDICAL EQUIPMENT MARKET

• CVD AND ION IMPLANTATION IN THE MEDICAL EQUIPMENT MARKET
• MEDICAL PRODUCT DEFINITION
  • TABLE 53 BASIC TYPES OF MEDICAL DEVICES
• INDUSTRY COMPETITIVENESS OF THIN FILM PROCESSES IN THE MEDICAL PRODUCT MARKET
• GLOBAL ECONOMICS
  • TABLE 54 GLOBAL PRODUCTION OF MEDICAL EQUIPMENT AND SUPPLIES BY REGION, 2007-2013 (%)
  • TABLE 55 POSITIVE ECONOMIC FACTORS FOR THE MEDICAL DEVICE INDUSTRY
• COST ISSUES
• TECHNOLOGY
• MEDICAL MARKET COMPETITIVENESS FACTORS
• Driving Force for CVD and Ion Implantation
• Impact of Market Growth Factors
  • TABLE 56 IMPACT OF MAJOR FACTORS ON THE GROWTH OF CVD AND ION IMPLANTATION IN THE MEDICAL INDUSTRY (%)
• MEDICAL INDUSTRY APPLICATIONS
• CVD PROCESS
  • TABLE 57 OVERVIEW OF CVD APPLICATIONS IN THE MEDICAL INDUSTRY
• ION IMPLANTATION APPLICATIONS
  • TABLE 58 MAJOR MEDICAL APPLICATIONS OF ION IMPLANTATION IN THE MEDICAL INDUSTRY
• TYPES OF CVD AND ION IMPLANTATION EQUIPMENT USED IN MEDICAL APPLICATIONS
• MAJOR MATERIALS USED FOR MEDICAL APPPLICATIONS
• CVD MATERIALS
  • TABLE 59 KEY MATERIALS DEPOSITED BY CVD FOR MEDICAL APPLICATIONS
• ION IMPLANTATION MATERIALS
  • TABLE 60 KEY MATERIALS USE FOR ION IMPLANTATION AND IBAD IN THE MEDICAL MARKET
• MEDICAL MARKET DRIVERS AND TRENDS
• THIN FILM EQUIPMENT DEMAND
• Fluctuating Growth Trends
  • TABLE 61 GLOBAL GROWTH TREND FOR MEDICAL EQUIPMENT AND THIN FILM EQUIPMENT, THROUGH 2007 (VALUE AND PERCENTAGE RATIOS)
• CVD
• ION IMPLANTATION
• FORECAST ASSUMPTIONS-CVD AND ION IMPLANTATION IN THE MEDICAL INDUSTRY
  • TABLE 62 FORECAST ASUMPTIONS-THIN FILM GROWTH IN THE MEDICAL PRODUCTS INDUSTRY
  • TABLE 63 PROJECTED GLOBAL GROWTH TREND FOR CVD AND ION TECHNOLOGIES IN MEDICAL, THROUGH 2013 (VALUE AND PERCENTAGE RATIO)
• FORECAST-VALUE OF MEDICAL CVD SHIPMENTS
  • TABLE 64 VALUE OF GLOBAL CVD SHIPMENTS FOR THE MEDICAL EQUIPMENT MARKET, THROUGH 2013 ($ MILLIONS)
  • FIGURE 9 GLOBAL SHIPMENTS OF CVD EQUIPMENT FOR THE MEDICAL SUPPLY BUSINESS, 2007-2013 ($ MILLIONS)
• FORECAST-VALUE OF MEDICAL IMPLANT EQUIPMENT SHIPMENTS
  • TABLE 65 FORECAST-VALUE OF GLOBAL ION IMPLANTATION EQUIPMENT SHIPMENTS FOR THE MEDICAL SUPPLY BUSINESS, THROUGH 2013 ($ MILLONS)
  • FIGURE 10 GLOBAL VALUE OF ION IMPLANTATION EQUIPMENT SHIPPED FOR MEDICAL PRODUCTS, 2007-2013 ($ MILLIONS)
• FORECAST-VALUE OF CVD DEPOSITED MATERIALS
• Measurement Considerations
  • TABLE 66 GLOBAL VALUE OF CVD-DEPOSITED MATERIALS IN THE MEDICAL SUPPLY INDUSTRY, THROUGH 2013 ($ MILLIONS)
• FIGURE 11 GLOBAL VALUE OF THIN FILM EQUIPMENT FOR THE MEDICAL SUPPLY BUSINESS, THROUGH 2013 ($ MILLIONS)
• FORECAST-VALUE OF IMPLANTATION MATERIALS
  • TABLE 67 GLOBAL VALUE OF MATERIALS USED FOR ION IMPLANTATION IN THE MEDICAL SUPPLY INDUSTRY ($ THOUSANDS)
  • FIGURE 12 VALUE OF MATERIALS USED FOR ION IMPLANTATION APPLICATIONS, 2007-2013 ($ THOUSANDS)
• FORECAST-VALUE OF THIN FILM EQUIPMENT SERVICES
• CVD Services
• Ion Implantation Services
  • TABLE 68 VALUE OF GLOBAL CVD AND ION IMPLANTATION SERVICES IN THE MEDICAL MARKET, THROUGH 2013 ($ MILLIONS)

Chapter- 8: CVD IN THE CUTTING TOOL MARKET

• CVD IN THE CUTTING TOOL MARKET
• PRODUCT DEFINITION
  • TABLE 69 BASIC TYPES OF CUTTING TOOLS
• CUTTING TOOL INDUSTRY COMPETITIVENESS
• ECONOMIC CONDITIONS
• Economic Warnings
• INTERNATIONAL CONDITIONS
• Changing Market Shares
  • TABLE 70 GLOBAL CUTTING TOOL MARKET BY REGION, 2007-2013 (%)
• TECHNOLOGY
• CUTTING TOOL GROWTH FACTORS
• Driving Force for CVD
• Impact of Market Growth Factors
  • TABLE 71 IMPACT OF MAJOR FACTORS ON THE GROWTH OF CVD IN THE CUTTING TOOL INDUSTRY (%)
• CUTTING TOOL APPPLICATIONS
  • TABLE 72 MAJOR CVD CUTTING TOOL APPLICATIONS
• TYPES OF CVD REACTORS
• CVD versus PVD Process
• ADVANTAGES OF CVD IN CUTTING TOOL COATING
• MAJOR MATERIALS USED IN CUTTING TOOLS
• TABLE 73 KEY MATERIALS DEPOSITED BY CVD IN THE CUTTING TOOL INDUSTRY
• CUTTING TOOL MARKET DRIVERS AND TRENDS
• CVD EQUIPMENT DEMAND
• Fluctuating Growth Trends
  • TABLE 74 GLOBAL GROWTH TREND FOR THE CUTTING TOOL INDUSTRY AND CVD EQUIPMENT, THROUGH 2007 (VALUE AND PERCENTAGE RATIO)
• FORECAST ASSUMPTIONS-CVD IN CUTTING TOOLS
  • TABLE 75 FORECAST ASSUMPTIONS FOR CVD GROWTH IN CUTTING TOOLS
  • TABLE 76 PROJECTED GLOBAL GROWTH TREND OF CVD FOR THE CUTTING TOOL INDUSTRY, THROUGH 2013
• FORECAST-VALUE OF CVD CUTTING TOOL INDUSTRY SHIPMENTS
  • TABLE 77 FORECAST-VALUE OF CVD EQUIPMENT FOR THE CUTTING TOOL MARKET, THROUGH 2013 ($ MILLIONS)
  • FIGURE 13 GLOBAL VALUE OF CVD EQUIPMENT FOR THE CUTTING TOOL INDUSTRY, 2007-2013 ($ MILLIONS)
• FORECAST-VALUE OF DEPOSITED CVD MATERIALS
• Measurement Considerations
  • TABLE 78 GLOBAL VALUE OF MATERIALS DEPOSITED BY CVD IN THE CUTTING TOOL INDUSTRY, THROUGH 2013 ($ MILLIONS)
• FIGURE 14 GLOBAL VALUE OF MATERIALS FOR CVD IN THE CUTTING TOOL INDUSTRY ($ MILLIONS)
• FORECAST-VALUE OF CVD SERVICES
  • TABLE 79 GLOBAL VALUE OF CVD COATING SERVICES IN THE CUTTING TOOL INDUSTRY, THROUGH 2013 ($ MILLIONS)

Chapter- 9: CVD AND ION IMPLANTATION IN THE INDUSTRIAL MARKET

• CVD AND ION IMPLANTATION IN THE INDUSTRIAL MARKET
• PRODUCT DEFINITION
  • TABLE 80 BASIC TYPES OF INDUSTRIAL PRODUCTS
• INDUSTRIAL MARKET COMPETITIVENESS
• AUTOMOTIVE MARKET
• Domestic and International Economic Conditions
  • TABLE 81 CLOSING GAP BETWEEN U.S AND ASIAN AUTOMAKERS (% OF MARKET)
• External Factors
  • TABLE 82 EXTERNAL FACTORS IMPACTING THE AUTO INDUSTRY
• Technology
• AEROSPACE MARKET
• Economic Considerations
  • TABLE 83 U.S. AEROSPACE SALES BY PRODUCT, 2001-2006 ($ BILLIONS)
• International Market
• Technology
• MARKET GROWTH FACTORS FOR INDUSTRIAL CVD AND ION IMPLANTATION
• Driving Force for CVD
• Impact of Market Growth Factors
  • TABLE 84 IMPACT OF MAJOR FACTORS ON CVD AND ION IMPLANTATION GROWTH IN THE INDUSTRIAL MARKET (%)
• INDUSTRIAL THIN FILM APPLICATIONS
• CVD PROCESS
• ION IMPLANTATION APPLICATIONS
  • TABLE 85 MAJOR APPLICATIONS FOR CVD AND ION IMPLANTATION IN THE INDUSTRIAL MARKET
• TYPES OF CVD AND ION IMPLANTATI0N EQUIPMENT USED IN INDUSTRIAL APPLICATIONS
• MAJOR MATERIALS USED FOR INDUSTRIAL APPLICATIONS
• CVD MATERIALS
  • TABLE 86 KEY MATERIALS DEPOSITED BY CVD FOR INDUSTRIAL APPLICATIONS
• ION IMPLANTLANTATION MATERIALS
  • TABLE 87 KEY MATERIALS USED FOR ION IMPLANTATION IN THE INDUSTRIAL MARKET
• INDUSTRIAL MARKET DRIVERS AND TRENDS
• THIN FILM EQUIPMENT DEMAND
• Fluctuating Growth Trends
  • TABLE 88 GLOBAL GROWTH TREND FOR INDUSTRIAL PRODUCTS AND THIN FIILM EQUIPMENT, THROUGH 2007 (VALUE AND PERCENTAGE RATIOS)
• CVD
• ION IMPLANTATION
• FORECAST ASSUMPTIONS-CVD AND ION IMPLANTATION IN THE INDUSTRIAL MARKET
  • TABLE 89 FORECAST ASSUMPTIONS-THIN FILM GROWTH IN THE INDUSTRIAL MARKET
  • TABLE 90 PROJECTED GLOBAL GROWTH TREND FOR CVD AND ION THIN FILM TECHNOLOGIES IN THE INDUSTRIAL SECTORS, THROUGH 2013 (VALUE AND PERCENTAGE RATIO)
• FORECAST-VALUE OF INDUSTRIAL CVD EQUIPMENT SHIPMENTS
  • TABLE 91 VALUE OF GLOBAL CVD SHIPMENTS FOR THE INDUSTRIAL MARKET, THROUGH 2013 ($ MILLIONS)
  • FIGURE 15 GLOBAL VALUE OF AUTOMOTIVE CVD SYSTEMS IN THE AUTOMOTIVE MARKET, 2007-2013 ($ MILLIONS)
  • FIGURE 16 GLOBAL VALUE OF CVD SYSTEMS IN THE AEROSPACE MARKET, THROUGH 2013 ($ MILLIONS)
• FORECAST-VALUE OF INDUSTRIAL ION IMPLANTANTION EQUIPMENT SHIPMENTS
  • TABLE 92 FORECAST-VALUE OF ION IMPLANTATION EQUIPMENT SHIPPED FOR THE INDUSTRIAL SEGMENT, THROUGH 2013 ($ MILLIONS)
  • FIGURE 17 GLOBAL VALUE OF ION-RELATED EQUIPMENT IN THE AUTOMOTIVE AND AEROSPACE INDUSTRIES, 2007-2013 ($ MILLIONS)
• FORECAST-VALUE OF CVD DEPOSITED MATERIALS
• Measurement Considerations
  • TABLE 93 GLOBAL VALUE OF MATERIALS DEPOSITED BY CVD IN THE INDUSTRIAL MARKETS, THROUGH 2013 ($ MILLIONS)
  • FIGURE 18 GLOBAL VALUE OF MATERIALS DEPOSITED BY CVD FOR THE INDUSTRIAL MARKET, 2007-2013 ($ MILLIONS)
• FORECAST-VALUE OF ION IMPLANTATION MATERIALS
  • TABLE 94 GLOBAL VALUE OF MATERIALS USED FOR ION-RELATED INDUSTRIAL APPLICATIONS, THROUGH 2013 ($ THOUSANDS)
  • FIGURE 19 GLOBAL VALUE OF MATERIALS USED FOR ION-RELATED INDUSTRIAL APPLICATIONS, 2007-2013 ($ THOUSANDS)
• FORECAST-VALUE OF THIN FILM EQUIPMENT SERVICES
• CVD Services
• Ion Services
  • TABLE 95 VALUE OF GLOBAL CVD AND ION IMPLANTATION SERVICES IN THE INDUSTRIAL MARKET, THROUGH 2013 ($ MILLIONS)
• Ion Services (Continued)